Introduction to microsystem design

Introduction to microsystem design

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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...

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Bibliographic Details
Main Author: Schomburg, Werner Karl
Corporate Author: SpringerLink (Online service)
Format: Electronic Resource
Language:English
Published: Berlin, Heidelberg Springer 2011.
Subjects:
Electronic book.
Microelectromechanical systems > Design and construction.
Online Access:Available for University of the Philippines Diliman via SpringerLink. Click here to access