Introduction to microsystem design

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...

وصف كامل

التفاصيل البيبلوغرافية
المؤلف الرئيسي: Schomburg, Werner Karl
مؤلف مشترك: SpringerLink (Online service)
التنسيق: Electronic Resource
اللغة:English
منشور في: Berlin, Heidelberg Springer 2011.
الموضوعات:
الوصول للمادة أونلاين:Available for University of the Philippines Diliman via SpringerLink. Click here to access