Design and manufacturing of active microsystems

Design and manufacturing of active microsystems

Podrobná bibliografie
Korporativní autor: SpringerLink (Online service)
Další autoři: Büttgenbach, Stephanus, Burisch, Arne, Hesselbach, Jürgen
Médium: Electronic Resource
Jazyk:English
Vydáno: Berlin, Heidelberg, New York Springer c2011.
Edice:Microtechnology and MEMS.
Témata:
Microelectronics.
Microelectromechanical systems.
Electronic books.
On-line přístup:Available for the University of the Philippines Diliman via SpringerLink. Click here to access