Design and manufacturing of active microsystems

Bibliografske podrobnosti
Korporativna značnica:	SpringerLink (Online service)
Drugi avtorji:	Büttgenbach, Stephanus, Burisch, Arne, Hesselbach, Jürgen
Format:	Electronic Resource
Jezik:	English
Izdano:	Berlin, Heidelberg, New York Springer c2011.
Serija:	Microtechnology and MEMS.
Teme:	Microelectronics. Microelectromechanical systems. Electronic books.
Online dostop:	Available for the University of the Philippines Diliman via SpringerLink. Click here to access