Micro mechanical systems principles and technology

Bibliographische Detailangaben
Weitere Verfasser:	Fukuda, T. 1948- (Toshio), Menz, W. (Wolfgang)
Format:	Electronic Resource
Sprache:	English
Veröffentlicht:	Amsterdam Elsevier 1998.
Schriftenreihe:	Handbook of sensors and actuators v. 6.
Schlagworte:	Microelectromechanical systems > Handbooks, manuals, etc. Electronic books.
Online Zugang:	Available for University of the Philippines System via ScienceDirect. Click here to access Also available remotely for University of the Philippines System via ScienceDirect. Click here to access thru EZproxy