Fundamentals of microfabrication and nanotechnology.

Fundamentals of microfabrication and nanotechnology. Volume II Manufacturing techniques for microfabrication and nanotechnology.

书目详细资料
主要作者: Madou, Marc J.
格式: 图书
语言:English
出版: Boca Raton, Fla. CRC Press c2012.
版:3rd ed.
主题:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfabrication.
Nanotechnology.