Fundamentals of microfabrication and nanotechnology. Volume II Manufacturing techniques for microfabrication and nanotechnology.
| Autor principal: | |
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| Format: | Llibre |
| Idioma: | English |
| Publicat: |
Boca Raton, Fla.
CRC Press
c2012.
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| Edició: | 3rd ed. |
| Matèries: |