Fundamentals of microfabrication and nanotechnology.

Fundamentals of microfabrication and nanotechnology. Volume II Manufacturing techniques for microfabrication and nanotechnology.

書誌詳細
第一著者: Madou, Marc J.
フォーマット: 図書
言語:English
出版事項: Boca Raton, Fla. CRC Press c2012.
版:3rd ed.
主題:
Microelectromechanical systems.
Nanoelectromechanical systems.
Microfabrication.
Nanotechnology.