Optical emission spectroscopy of low temperature PECVD of diamond and DLC films
"The gas phase chemistry in low temperature (<300°C) diamond and diamond-like carbon (DLC) chemical vapor deposition processes was investigated using optical emission spectroscopy (OES) to determine the effects of the different deposition parameters such as methane concentration, substrate t...
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 語言: | English |
| 出版: |
c2004.
|
| 主題: |