Hybrid platform for high-tech equipment protection against earthquake and microvibration.
To ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the saf...
| Published in: | Earthquake engineering & structural dynamics. 35, 8 (2006). |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Subjects: |