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Formation of SiHx on Silicon (100) using low energy negative hydrogen ions from a magnetized sheet plasma source

Bibliografske podrobnosti
Glavni avtor: Fernandez, Marcedon S. (Author)
Format: Thesis
Jezik:angleščina
Izdano: 2004.
Teme:
Ion bombardment.
IonImplantation.
Plasma chemistry.
Ion mobility spectroscopy.