Monitoring batch processes with multiple on-off steps in semiconductor manufacturing.
A modern semiconductor manufacturing line is made of hundreds of sequential batch processing stages. Each of these stages consists of many steps carried out by expensive tools, which are monitored by numerous sensors capable of sampling at intervals of seconds. The sensor readings of each run consti...
| 發表在: | Journal of Quality Technology 43, 2 (2011). |
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| 格式: | Article |
| 語言: | 英语 |
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