Chemical vapor deposition thermal and plasma deposition of electronic materials

Chemical vapor deposition thermal and plasma deposition of electronic materials

Manylion Llyfryddiaeth
Prif Awdur: Sivaram, S.
Fformat: Llyfr
Iaith:English
Cyhoeddwyd: New York Van Nostrand Reinhold c1995.
Pynciau:
Microelectronics industry.
Chemical vapor deposition.
Microelectronics > Materials.