Surface modification of kapton polyimide using a DC-powered ion shower system
Polyimide is one of the widely used materials for semiconductor and electronics application because of its excellent properties. However, there is a need for this material to be surface treated because it has poor adhesion during processing. Plasma surface modification treatment is one of the cleane...
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| 格式: | Thesis |
| 语言: | English |
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2011.
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