Surface modification of kapton polyimide using a DC-powered ion shower system
Polyimide is one of the widely used materials for semiconductor and electronics application because of its excellent properties. However, there is a need for this material to be surface treated because it has poor adhesion during processing. Plasma surface modification treatment is one of the cleane...
| Hoofdauteur: | |
|---|---|
| Formaat: | Thesis |
| Taal: | Engels |
| Gepubliceerd in: |
2011.
|
| Onderwerpen: |