Plans for Next-Gen Chips Imperiled.

Plans for Next-Gen Chips Imperiled.

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In chip industry, a technique called extreme ultraviolet (EUV) photolithography would be ready to start churning out cutting-edge logic chips. Today's technology uses light with a wavelength of 193 nanometers to produce chips with key parts, or features, that measure just 65 nm.

Bibliographic Details
Published in:IEEE spectrum 44, 8 (2007).
Main Author: Santo, B.
Format: Article
Language:English
Subjects:
EUV technique.
Chip industry.
Extreme ultraviolet photolithography.
Logic chips.
Photoresist.
Size 65 nm.
Wavelength 193 nm.