Dim prospects for bright light.
Using ultrashort light rays to print tiny features on integrated circuits has long been a dream of chipmakers, but suppliers of the necessary tools have been dashing that dream for a decade. The sources remain too weak to print more than a handful of wafers per hour, and critical parts still lack fu...
| Published in: | IEEE spectrum 47, 1 (2010). |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Subjects: |