Indirect adaptive control of reactive ion etching using neural networks.
This paper explores the use of neural networks for real-time, model-based feedback control of reactive ion etching (RIE). This objective is accomplished in part by constructing a predictive model for the system which can be approximately inverted to achieve the desired control. An indirect adaptive...
| הוצא לאור ב: | IEEE Transactions on robotics and automation 17, 5 (2001). |
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| מחבר ראשי: | |
| פורמט: | Article |
| שפה: | אנגלית |
| נושאים: |