Design of intelligent data sampling methodology based on data mining.
We present a new and better application of data mining techniques by designing an intelligent in-line measurement sampling method for process parameter monitoring in a wafer fabrication. The sampling method specifies the chip locations within the wafer to be measured, and the number of measured chip...
| Publicat a: | IEEE Transactions on robotics and automation 17, 5 (2001). |
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| Autor principal: | |
| Format: | Article |
| Idioma: | English |
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