Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication.

Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication.

A genetic algorithm (GA) embedded search strategy over a colored timed Petri net (CTPN) for wafer fabrication is proposed. Through the CTPN model, all possible behaviors of the wafer manufacturing systems, such as WIP status and machine status, can be completely tracked down by the reachability grap...

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Bibliographic Details
Published in:IEEE Transactions on robotics and automation 17, 5 (2001).
Main Author: Jyh-Horn Chen
Format: Article
Language:English
Subjects:
Colored timed Petri.
Genetic algorithm.
Performance evaluation.
Production control.
Scheduling.
Search method.
Semiconductor manufacturing.
Wafer fabrication.
Wafer manufacturing.