Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation.

Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation.

Computational efficiency is one of the major challenges of applying simulation to short-term operation scheduling of semiconductor wafer fabrication factories (fabs), which are characterized by re-entrant process flows, stringent production control requirements and fast changing technology and busin...

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Bibliografiska uppgifter
I publikationen:IEEE Transactions on robotics and automation 17, 5 (2001).
Huvudupphovsman: Bo-Wei Hsieh
Materialtyp: Artikel
Språk:English
Ämnen:
Dispatching rules.
Dynamic rule selection.
Machine failures.
Optimal computing budget allocation techniques.
Ordinal optimization-based simulation.
Performance index.
Production control requirements.
Re-entrant process flows.
Semiconductor wafer fabrication.
Semiconductor wafer fabs.
Short-term operation scheduling.
Time horizon.
Uncertainty handling.
Wafers-in-process.