Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates.

Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates.

Focuses on production scheduling in a semiconductor wafer fab producing multiple product types that have different due dates and different process flows. In the wafer fab, wafer lots are processed on serial and batch processing workstations, each of which consists of parallel identical machines. Mac...

Ausführliche Beschreibung

Bibliographische Detailangaben
Veröffentlicht in:IEEE Transactions on robotics and automation 17, 5 (2001).
1. Verfasser: Yeong-Dae Kim
Format: Artikel
Sprache:English
Schlagworte:
Batch processing workstations.
Batch scheduling.
Decision problems.
Distinct due dates.
Lot release control.
Lot scheduling.
Multiple product types.
Process flows.
Production scheduling.
Semiconductor wafer fab.
Semiconductor wafer fabrication facility.
Serial processing workstations.
Total tardiness.
Wafer lots.