Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates.

Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates.

Focuses on production scheduling in a semiconductor wafer fab producing multiple product types that have different due dates and different process flows. In the wafer fab, wafer lots are processed on serial and batch processing workstations, each of which consists of parallel identical machines. Mac...

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Bibliografische gegevens
Gepubliceerd in:IEEE Transactions on robotics and automation 17, 5 (2001).
Hoofdauteur: Yeong-Dae Kim
Formaat: Artikel
Taal:English
Onderwerpen:
Batch processing workstations.
Batch scheduling.
Decision problems.
Distinct due dates.
Lot release control.
Lot scheduling.
Multiple product types.
Process flows.
Production scheduling.
Semiconductor wafer fab.
Semiconductor wafer fabrication facility.
Serial processing workstations.
Total tardiness.
Wafer lots.