A diode-based two-wire solution for temperature-compensated piezoresistive pressure sensors.
A novel two-wire solution for ultraminiaturized temperature-compensated piezoresistive pressure sensors is presented. The technique makes it possible to measure both pressure and temperature separately by using bias-controlled diodes as switches between the pressure and temperature sensing elements....
| Izdano u: | IEEE Transactions on electron devices 50, 2 (2003). |
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| Glavni autor: | |
| Format: | Članak |
| Jezik: | English |
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