Renormalization group meshes and the discretization of TCAD equations.
This paper presents a new method to discretize the equations for the physical modeling of semiconductor devices and back-end patterns. The method assembles planes in two dimensions and cubes in three dimensions and allows for adaptive meshing without the occurrence of spurious nodes due to mesh smoo...
| Izdano u: | IEEE Transactions on computer-aided design of integrated circuits and systems 21, 12 (2002). |
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| Glavni autor: | |
| Format: | Članak |
| Jezik: | English |
| Teme: |