An analytic Volterra-series-based model for a MEMS variable capacitor.

Microelectromechanical systems (MEMS) components are gradually finding their way in communication applications. To fully understand their behavior in electrical circuits, an interpretable model is required that, in addition, can be simulated efficiently. This paper presents a model for a MEMS variab...

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发表在:IEEE Transactions on computer-aided design of integrated circuits and systems 22, 2 (2003).
主要作者: Innocent, M.
格式: 文件
语言:English
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