An analytic Volterra-series-based model for a MEMS variable capacitor.

An analytic Volterra-series-based model for a MEMS variable capacitor.

Microelectromechanical systems (MEMS) components are gradually finding their way in communication applications. To fully understand their behavior in electrical circuits, an interpretable model is required that, in addition, can be simulated efficiently. This paper presents a model for a MEMS variab...

Full description

Bibliographic Details
Published in:IEEE Transactions on computer-aided design of integrated circuits and systems 22, 2 (2003).
Main Author: Innocent, M.
Format: Article
Language:English
Subjects:
MEMS variable capacitor.
MEMS varicap.
RF communication circuits.
RFIC.
Analytic Volterra-series-based model.
Behavioral model.
Circuit simulation.
Frequency dependence.
Mechanical resonance.
Microelectromechanical systems.
Nonlinear behavior.