A hybrid Nb

A process for hybrid superconductor/CMOS integration was developed for the fabrication of extremely sensitive color-imaging arrays using superconducting tunnel junctions. A Nb-AlOx-Nb process was used to fabricate arrays of junctions directly on top of CMOS devices. The CMOS wafers required the deve...

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Bibliographic Details

Published in:	IEEE Transactions on applied superconductivity 12, 3 (2002).
Main Author:	Wong, A.
Format:	Article
Language:	English
Subjects:	3 micron. Nb-AlOx-Nb. Chemical-mechanical polishing. Color-imaging arrays. Critical current spreads. Hybrid Nb/CMOS integration process. Photon detector. Planarization process. Plasma-enhanced chemical vapor deposition. Sacrificial oxide layer. Spin-on glass. Stability. Superconducting tunnel junctions. Via contacts.