Chip making's wet new world.

Putting a drop of water between the lens and the silicon wafer allows a system to resolve lines a few hundred atoms wide. Researchers are counting on it to lift the technology from its last legs and carry it through the end of the decade.

Библиографические подробности
Опубликовано в::IEEE spectrum 41, 5 (2004).
Главный автор: Geppert, L.
Формат: Статья
Язык:английский
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