Brown, A. Flat, cheap, and under control [electrochemical mechanical planarization]. IEEE spectrum.
Chicago Style (17th ed.) CitationBrown, A.S. "Flat, Cheap, and Under Control [electrochemical Mechanical Planarization]." IEEE Spectrum .
MLA (9th ed.) CitationBrown, A.S. "Flat, Cheap, and Under Control [electrochemical Mechanical Planarization]." IEEE Spectrum, .
Warning: These citations may not always be 100% accurate.