APA (7th ed.) Citation

Brown, A. Flat, cheap, and under control [electrochemical mechanical planarization]. IEEE spectrum.

Chicago Style (17th ed.) Citation

Brown, A.S. "Flat, Cheap, and Under Control [electrochemical Mechanical Planarization]." IEEE Spectrum .

MLA (9th ed.) Citation

Brown, A.S. "Flat, Cheap, and Under Control [electrochemical Mechanical Planarization]." IEEE Spectrum, .

Warning: These citations may not always be 100% accurate.