Process and circuit design interlock for application-dependent scaling tradeoffs and optimization in the SoC era.
Several physical phenomena in highly scaled CMOS technology have now become first-order elements affecting the electrical behavior of transistor characteristics. Effects such as STI mechanical stress, direct tunneling in gate dielectrics, gate line-edge roughness, and others can have significant inf...
| Published in: | IEEE Journal of solid state circuits 38, 3 (2003). |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Subjects: |