Fundamentals of semiconductor manufacturing and process control

Fundamentals of semiconductor manufacturing and process control

Bibliografiska uppgifter
Huvudupphovsman: May, Gary S.
Övriga upphovsmän: Spanos, Costas J.
Materialtyp: Bok
Språk:English
Publicerad: Hoboken, N.J. Wiley-Interscience c2006.
Ämnen:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.