Fundamentals of semiconductor manufacturing and process control

Fundamentals of semiconductor manufacturing and process control

Détails bibliographiques
Auteur principal: May, Gary S.
Autres auteurs: Spanos, Costas J.
Format: Livre
Langue:English
Publié: Hoboken, N.J. Wiley-Interscience c2006.
Sujets:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Process control > Statistical methods.