May, G. S., & Spanos, C. J. (2006). Fundamentals of semiconductor manufacturing and process control. Wiley-Interscience.
Lua i Stíl Chicago (17ú heag.)May, Gary S., agus Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, N.J: Wiley-Interscience, 2006.
Lua MLA (9ú heag.)May, Gary S., agus Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Wiley-Interscience, 2006.
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