Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Bibliografiske detaljer
Andre forfattere: Jackson, Mark J.
Format: Bog
Sprog:English
Udgivet: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Fag:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.