Microfabrication and nanomanufacturing

Bibliographische Detailangaben
Weitere Verfasser:	Jackson, Mark J.
Format:	Buch
Sprache:	English
Veröffentlicht:	Boca Raton, Fla. CRC/Taylor & Francis 2006.
Schlagworte:	Microelectronics. Integrated circuits > Design and construction. Nanomanufacturing. Microelectromechanical systems > Design and construction.