Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Bibliografische gegevens
Andere auteurs: Jackson, Mark J.
Formaat: Boek
Taal:English
Gepubliceerd in: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Onderwerpen:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.