Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Xehetasun bibliografikoak
Beste egile batzuk: Jackson, Mark J.
Formatua: Liburua
Hizkuntza:English
Argitaratua: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Gaiak:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.