Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Библиографические подробности
Другие авторы: Jackson, Mark J.
Формат: ‌
Язык:English
Опубликовано: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Предметы:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.