Microfabrication and nanomanufacturing

Microfabrication and nanomanufacturing

Podrobná bibliografie
Další autoři: Jackson, Mark J.
Médium: Kniha
Jazyk:English
Vydáno: Boca Raton, Fla. CRC/Taylor & Francis 2006.
Témata:
Microelectronics.
Integrated circuits > Design and construction.
Nanomanufacturing.
Microelectromechanical systems > Design and construction.