Microfabrication and nanomanufacturing

Detalhes bibliográficos
Outros Autores:	Jackson, Mark J.
Formato:	Livro
Idioma:	English
Publicado em:	Boca Raton, Fla. CRC/Taylor & Francis 2006.
Assuntos:	Microelectronics. Integrated circuits > Design and construction. Nanomanufacturing. Microelectromechanical systems > Design and construction.