Novel VOA using in-plane reflective micromirror and off-axis light attenuation.

A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for V...

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Pubblicato in:IEEE Communications magazine 41, 8 (2003).
Autore principale: Chen, Chihchung
Natura: Articolo
Lingua:English
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