Novel VOA using in-plane reflective micromirror and off-axis light attenuation.
A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for V...
| Vydáno v: | IEEE Communications magazine 41, 8 (2003). |
|---|---|
| Hlavní autor: | |
| Médium: | Článek |
| Jazyk: | English |
| Témata: |