MEMS optical switches.

MEMS optical switches.

Leveraging MEMS's inherent advantages such as the batch fabrication technique, small size, integrability, and scalability, MEMS is positioned to become the dominant technology in optical crossconnect switches. MEMS optical switches with complex movable 3D mechanical structures, micro-actuators,...

Ausführliche Beschreibung

Bibliographische Detailangaben
Veröffentlicht in:IEEE Communications magazine 39, 11 (2001).
1. Verfasser: Yeow, Tze-Wei
Format: Artikel
Sprache:English
Schlagworte:
2D approaches.
3D approaches.
MEMS optical switches.
Actuating mechanisms.
Batch fabrication technique.
Bulk micromachining.
Complex movable 3D mechanical structures.
Integrability.
Micro-actuator.
Optical crossconnect switches.
Scalability.
Size.
Surface micromachining.
Switch architectures.