MEMS optical switches.

MEMS optical switches.

Leveraging MEMS's inherent advantages such as the batch fabrication technique, small size, integrability, and scalability, MEMS is positioned to become the dominant technology in optical crossconnect switches. MEMS optical switches with complex movable 3D mechanical structures, micro-actuators,...

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Bibliographic Details
Published in:IEEE Communications magazine 39, 11 (2001).
Main Author: Yeow, Tze-Wei
Format: Article
Language:English
Subjects:
2D approaches.
3D approaches.
MEMS optical switches.
Actuating mechanisms.
Batch fabrication technique.
Bulk micromachining.
Complex movable 3D mechanical structures.
Integrability.
Micro-actuator.
Optical crossconnect switches.
Scalability.
Size.
Surface micromachining.
Switch architectures.