Sotto, R. H. (2008). Parametric study of the reactive ion etching of silicon.
Cita Chicago (17th ed.)Sotto, Romelyn H. Parametric Study of the Reactive Ion Etching of Silicon. 2008.
Cita MLA (9th ed.)Sotto, Romelyn H. Parametric Study of the Reactive Ion Etching of Silicon. 2008.
Atenció: Aquestes cites poden no estar 100% correctes.