Sotto, R. H. (2008). Parametric study of the reactive ion etching of silicon.
Chicago Style (17th ed.) CitationSotto, Romelyn H. Parametric Study of the Reactive Ion Etching of Silicon. 2008.
MLA (9th ed.) CitationSotto, Romelyn H. Parametric Study of the Reactive Ion Etching of Silicon. 2008.
Warning: These citations may not always be 100% accurate.