Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

ver descrição completa

Detalhes bibliográficos

Autor principal:	Manglicmot, Lester Ryan G.
Outros Autores:	Minon, Jun King P.
Formato:	Tese
Idioma:	English
Publicado em:	2009
Assuntos:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.