Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

Descripción completa

Detalles Bibliográficos

Autor principal:	Manglicmot, Lester Ryan G.
Otros Autores:	Minon, Jun King P.
Formato:	Tesis
Lenguaje:	English
Publicado:	2009
Materias:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.