Development of a high sensitivity MEMS accelerometer for bipedal robots

MEMS accelerometers have various applications such as seismic activities monitoring, automotives, aerospace navigation systems and other inertial sensing applications. In particular, accelerometers together with gyroscopes are used for motion sensing of bipedal robots. High sensitivity capacitive ME...

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Hlavní autor:	Manglicmot, Lester Ryan G.
Další autoři:	Minon, Jun King P.
Médium:	Diplomová práce
Jazyk:	English
Vydáno:	2009
Témata:	Microelectromechanical systems > Design and construction. Robots > Kinematics. Accelerometers > Design and construction. Mobile robots. Bipedal robots. MEMS.