Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| Huvudupphovsman: | |
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| Materialtyp: | Bok |
| Språk: | English |
| Publicerad: |
Boca Raton, Fla.
CRC Press
c2005.
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| Upplaga: | 2nd ed. |
| Serie: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Ämnen: |