Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
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| Формат: | |
| Язык: | English |
| Опубликовано: |
Boca Raton, Fla.
CRC Press
c2005.
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| Редактирование: | 2nd ed. |
| Серии: | Nano- and microscience, engineering, technology, and medicine series
8 |
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