Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| 1. autor: | |
|---|---|
| Format: | Książka |
| Język: | English |
| Wydane: |
Boca Raton, Fla.
CRC Press
c2005.
|
| Wydanie: | 2nd ed. |
| Seria: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Hasła przedmiotowe: |