Nano- and micro-electromechanical systems fundamentals of nano- and microengineering

Bibliografski detalji
Glavni autor: Lyshevski, Sergey Edward
Format: Knjiga
Jezik:English
Izdano: Boca Raton, Fla. CRC Press c2005.
Izdanje:2nd ed.
Serija:Nano- and microscience, engineering, technology, and medicine series 8
Teme: