Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton, Fla.
CRC Press
c2005.
|
| Ausgabe: | 2nd ed. |
| Schriftenreihe: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Schlagworte: |