Nano- and micro-electromechanical systems fundamentals of nano- and microengineering
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| 格式: | 图书 |
| 语言: | English |
| 出版: |
Boca Raton, Fla.
CRC Press
c2005.
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| 版: | 2nd ed. |
| 丛编: | Nano- and microscience, engineering, technology, and medicine series
8 |
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